When combined with Thermo Scientific Auto Slice & View Software, DualBeam instruments provide 3D insight into sample structure by selectively removing (milling) the material for subsurface characterization. Digital reconstruction generates multi-modal 3D datasets that can consist of a variety of signals, including backscattered electron (BSE) imaging for maximum materials contrast, energy dispersive spectroscopy (EDS) for compositional information, and electron backscatter diffraction (EBSD) for microstructural and crystallographic information.

The SEM capability of DualBeam instruments offers nanoscale details across a wide range of working conditions, from structural information obtained at 30 keV in STEM mode to charge-free, detailed surface information at lower energies. With unique in-lens detectors, DualBeam systems are designed for simultaneous acquisition of angular/energy-selective secondary-electron and BSE data. Fast, accurate, and reproducible results are provided by our unique SEM column design, which features fully automated lens alignments.